Forno tubolare da 1200°C max per CVD assistita da plasma a microonde (MPCVD) da 2" - GSL-1200X-50-MWPE

• 1400W 2.45 GHz microwave chamber
• Stainless steel and aluminum shield to protect from microwave radiation 
• Rapid heating up to 20 ºC/minute speed
• Heating module inside microwave chamber with max. working temperature 1200°C
• Precision temperature control with 30 segments programable within +/- 1ºC
• Vacuum casting thermal insulation material for max. energy saving.

• 2000W 
• 208-240VAC, Single phase, 50/60Hz

• Frequency: 2.45 GHz ±25 MHz
• Power Output: 1400W
• Microwave leaking: ≤ 3 mW/cm² at 1 meter away. 
• One digital power controller is built in to adjust output power from 10 - 100%

• Ni-Cr-Al wire heating coin with 80 mm ID is installed inside fibrous alumina module (Pic. 1)
• The heating coil is placed inside the microwave chamber
• 2" quartz tube ( OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma (Pic.2)

Pic. 1 Pic. 2

• One pair of vacuum flange is included to seal the quartz tube
• KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
• One digital vacuum gauge is included for vacuum control ( Pic. 2)
• Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
• The pump is not included. Please click Pic. 3 to order separately. For CVD application, suggest choosing a dry pump.

Pic. 1 Pic. 2   Pic.3

 Working Temperature

• Max. 1200ºC < 30 minutes with heating module assisted
• Min. 800ºC with heating module assisted
• ≤1100ºC continuous with heating module assisted and Plasma
• Heating rate: 1 ~20°C / min programmable
• ~750ºC heating by microwave only without temperature control

 Temperature Controller

• CE Certified
• NRTL or CSA certification is available upon request