Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder
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Delivery and Shipping to EU
Delivery and Shipping to EU
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Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder
MTI
Aluminum Nitride Ceramic Substrates Properties | |
Item No. |
AIN-Holder |
Purity (wt%) |
99% (AN5116) |
Density (g/cm3) |
>3.26 |
Thermal Conductivity (W/m. K) |
>170 |
Thermal Expansion (x10-6/oC) |
<4.2 |
Dielectric Strength (Kv/mm) |
>15 |
Dielectric Constant (at 1MHZ) |
8.7 |
Loss Tangent (x104@1 MHz) |
3 - 7 |
Volume Resistivity (ohm-cm) |
>1014 |
Flexural Strength (Kgf/mm) |
>30 |
Substrate Specifications |
3" or 5" diameter, 0.65mm thickness |
Product Configuration
|
The unpolished AIN in the center of holder is able to hold test samples up to 3" or 5" diam.
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