SrTiO3 Substrate with Step Surface & Ti terminated (100) 10x10x0.5mm, 1 SP - STOa101005S1StepUS
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SrTiO3 Substrate with Step Surface & Ti terminated (100) 10x10x0.5mm, 1 SP - STOa101005S1StepUS
MTI
Surface of SrTiO3 substrate after Step treatment (AFM)
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Surface of SrTiO3 substrate before Step treatment (AFM)
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Typical AFM picture of step STO substrate
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- Size: 10x10x 0.5mm +/-0.05mm
- Orientation: 0.1º miscut from (100) ( +/- 0.1º from Y and X direction )
- Polish: One sides EPI polished by CMP tecnology with less sub-surface lattice damage
- Surface Termination: TiO2 layer ( via special etching)
- Surface finish (RMS or Ra): <5A
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Typical Physical Properties |
Crystal Structure |
Cubic, a=3.905Å |
Growth Method |
Vernuil |
Density |
5.175 g/cm3 |
Melt Point |
2080 oC |
Hardness |
6 ( Mohn) |
Thermal expansion |
10.4 (x10-6/ oC) |
Dielectric Constant |
~ 300 |
Loss Tangent at 10 GHz |
~5x10-4 @ 300K , ~3 x10-4 @77K |
Color and Appearance |
Transparent (sometimes slightly brown based on annealing condition). No twins. |
Chemical Stability |
Insoluble in water |
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