LaAlO3, (110) orn. EPI polishing 3" x 0.5mm wafer 1 SP --- MTI Special !!!-1

Substrate Specifcations:

• Wafer Size:    3" dia +/- 0.5 mm   x  0.5 thickness +/-0.05 mm
• Wafer Orientation:   (110) +/-0.5 Deg 
• Edge Orientation:   <001> +/-1 Deg with 20 mm Length
  
• Polishing:   CMP polished with free sub-surface damaged
  
• Surface finish (RMS or Ra) :  < 15A
• Package:    Under 1000 class clean room, and in 100 grade plastic bag in a wafer container.
• Lattice Constant   a=3.792ŠPseudo cubic
• Warning: LaAlO3 crystal  has a visible twin on a polished surface, which is normal nature .

• For detailed physical properties of LaAlO3 crystal, please click here
• For typical crystal rocking curve, please click here
• For MSDS, please click here
•  For the AFM of LaAlO3, please click here.
•  If you need a certificate of analysis, please click here