Compact Thermal Evaporating Coater with Precision Temperature Control - GSL-1700X-SPC2

• 6" OD x 10” H quartz chamber for easy cleaning and sample loading
• 2" Dia rotary sample holder for uniform film coating
• Tungsten coil heater and alumina crucible for high-temperature coating up to 1700 ºC
• Precision temperature control with 30 programmable segments and +/- 1 ºC accuracy
• The high vacuum can be achieved up to 1.0E-5 Torr via an optional turbopump
• The gas flow port and valve are built-in for chamber purge and CVD possibility

• Input voltage: 208 - 240 VAC 50/60 Hz, single phase
• Input Power: 500 W
• Output Power: 40 A max current. Recommended working current <20 A
• Power cable included without the plug
• 110VAC power is available with a transformer 750W ( click underline to order )

• A tungsten coil heater with a B type of thermocouple and Alumina crucible is built in at the bottom of the vacuum chamber. (Pic. 1 )
• One digital temperature controller with 30 programmable segments and +/- 1 ºC accuracy (PIC. 2)
• Recommend to limit the heating/cooling rate to 0.3 ºC/s below 1200 ºC, and limit to 0.15 ºC/s from 1200 - 1700 ºC.
• For fast coating up to 2000 °C, such as Carbon, Au, and Cu coating, the user can remove the thermocouple, alumina thermal block, and alumina crucible, and load evaporation material directly into the tungsten coil heater. (PIC.3)
• Note: Due to the removal of the thermocouple, temperature readings, high-temperature alarm, and heating progress are not available. Operators have to use their eyes to evaluate the temperature based on the color change of the heating filament.
• After setting all steps, manually control the Amp(mA) switch based on the evaporation current meter (PIC.4)
• Four alumina crucibles (up to 1700 ºC) and two tungsten coil heaters are included. Please refer to the Optional section for ordering spare parts.
•   PIC 1 PIC 2  PIC 3 PIC 4 

• One 50 mm Dia. rotational sample stage and a shutter are installed on the top flange.
• Rotating speed: 5 rpm
• The distance from the sample holder to the evaporation source is adjustable from 40 mm to 85 mm
• Please click here to learn how to adjust the position of the sample stage.

• Precision quartz thickness sensor is optional, please click pic.1 & 2 for details. It can be built into the chamber to provide instant film thickness monitoring with an accuracy of 0.10 Å. LED Display Unit outside the chamber can:
• Input coating material info based on the included database
• Display total coating thickness and coating speed
• Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is available at extra cost, please click pic.2 

• The KF25 vacuum port is installed to connect to a vacuum pump
• The highest vacuum may reach <4.0E-6 Torr by pumping overnight with optional Turbomolecular pump
• A vacuum pump is required for coating. Please choose from the following Product Options
• Anti-Corrosive Capacitance Diaphragm Gauge is included for vacuum up to 1.0E-6 Torr Pic.1
• A vacuum pump is optional. Please click Pic. 2 or 3 to order Double-Stage Rotary Vane Vacuum Pump ( 10-2 torr) or turbopump ( 10-5 torr)
• Pic. 1  Pic. 2  Pic. 3

• 1/4 tube fitting is built-in for chamber purge or forming gas processing
• One needle valve is built-in to control gas flowing rate

• Extra alumina crucible and tungsten coil heater can be ordered at MTI at extra cost. (Click the pictures below). Optional alumina-coated W crucible and W boat is available upon request ( see below right pic)
• A total of 4 evaporating sources crucibles could be used to deposit multiple different materials to grow multilayers one by one in the same chamber atmosphere.
•                 (optional)

• O.D.:165mm
• I.D.: 150mm
• Length: 250mm
• Please click here to order the Quartz Chamber replacement.

• CE Certificate
• NRTL or CSA certification is available upon request

• To achieve the high vacuum required for the evaporation of some materials, the user can
• Check the chamber, O-ring, and flange for any particle, fiber, or scratch. Use lint-free tissue wetted with isopropyl alcohol (IPA) to wipe clean the surface
• Use heater tape to bake the chamber at 150 ºC and pre-heat the coil heater and crucible at 500 ºC while pumping with the optional turbopump for at least 2 hours
• Pump the chamber overnight without heating if a vacuum higher than 1.0E-5 Torr is needed
• The coater can be placed into an Ar or N2 gas glove box for thermal evaporation of humility & oxygen-sensitive materials, such as Li metal. Click the left picture for a demo in MTI's VGB-6OP glove box ( If you have other brand gloveboxes, you may need feedthrough of KF40 to connect a vacuum pump outside )
• DO NOT start the heating program or manually ramp up the current without an enclosed chamber and a vacuum!
• DO NOT release the vacuum or stop pumping when the coater is in evaporation operation! During the heater cool down, stop pumping or release the vacuum ONLY when the temperature is decreased below 100 ºC!
  

SPC2-ARSC