Computerized Mass Flow Controller (Max. 1000 SCCM) - EQ-MFC-COM
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Computerized Mass Flow Controller (Max. 1000 SCCM) - EQ-MFC-COM
Computerized Mass Flow Controller (Max. 1000 SCCM) - EQ-MFC-COM
MTI
- This product did not have a display, it must be controlled by the computer using manufacturer software.
- Digital Mass Flow Controller for Gas Control Systems
- Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
- Used for accurately controlling and measuring the gas flow rate of high pressure.
- Ideal for CVD and other gas mixture applications.
- International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.
Full scale range (N2) |
( 0100,200,500,1000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com |
Accuracy |
±1.0% S.P. (?35% F.S.) |
±0.35% F.S.(35% F.S.) | |
Repeatability |
±0.2% FS |
Linearity |
±0.5% FS |
Response Time |
?1sec |
Valve Rest Position |
Normally Closed or Normally Open |
Temperature Coefficient |
Zero: ?±0.05% F.S./ Span: ?±0.1% F.S.?30 SLM Span: ?±0.2% F.S.30 SLM |
Zero Drift |
0.6%F.S. per year without autozero |
Surface Finish(Ra) |
25Ra |
Operation Temperature |
545 |
Communication Interface for input Signal |
Digital: RS485 DeviceNetTM Analog:(05)VDC or (420)mA |
Communication Interface for Output Signal |
Digital: RS485 DeviceNetTM Analog:(05)VDC or (420)mA |
Power Supply |
±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) |
Electronic Connector |
D-sub 9 pins male, D-sub 15 pins male, DeviceNetTM male |
Differential Pressure |
(0.050.35) Mpa?10000SCCM (0.10.35) Mpa20000SCCM,30000SCCM (0.20.45) Mpa50000SCCM |
Max Pressure |
3MPa |
Leak integrity |
1×10-9 atm·cc / sec He1×10-10 Pa·m3 / sec He |
Seals Materials |
Viton; Neoprene |
Surface Chemistry (EP only) |
—— |
Fittings |
Swagelok1/4” |
Weight |
1kg |
