Bubbler / Evaporator for Liquid Precursors Delivery in CVD Processes (150, 300, 600 or 1000ml optional) - BL-SS-1

In typical CVD processes, The Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapor phase. Such a unit features two stainless steel needle valves with 1/4'' Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation. Its leak-free 316 Stainless Steel vessel is able to withstand pressure up to 0.15Mpa @ 250°C.   Please choose150mL, 300mL, 600mL and 1000 mL at product option bar.

Model#	BL-SS-150	BL-SS-300	BL-SS-600	BL-SS-1000
Vessel Volume	150ml	300ml	600ml	1000ml
Vessel Dimensions	Inner: ?45 x  84mm Outer: ?51 x  104mm	Inner: ?45 x 180mm  Outer: ?51 x 187mm	Inner: ?70 x 154mm Outer: ?76 x 200mm	Inner: ?70 x 258mm Outer: ?76 x 300mm
Tool	KF-40 Quick Clamp with Rubber O-Ring - EQ-KF-Clamp-D40	KF-40 Quick Clamp with Rubber O-Ring - EQ-KF-Clamp-D40	Spanner Hook Wrench (78-85 mm) for BL-SS, MTI-BLSS-SHW	Spanner Hook Wrench (78-85 mm) for BL-SS, MTI-BLSS-SHW
Max. Working Temp.	150°C	150°C	250°C	250°C
Option Heating Jacket EQ-HC with build in K-type thermocouple	Price: RFQ		(Power: 500W, Belt Height 50mm)
Overall Dimensions	130 x 70 x 340mm (L x W x H)	130 x 70 x 440mm (L x W x H)	130 x 90 x 440mm (L x W x H)	130 x 90 x 540mm (L x W x H)
Vessel Material	316 Stainless Steel
Pressure Gauge	-0.1 ~ 0.15 Mpa
Max. Pressure	0.15Mpa
Fittings	Two SS needle valves with 1/4" Tube Fittings
Application Notes	Vessel should be cleaned after each use to prevent contaminants and bacteria build up. Never heat the source liquid inside the vessel near its boiling point without opening valve You may order  precision MFC to deliver vapor ( click picture below-left 1 ) Please (click the picture below-right 3) to see our updated   Compact Liquid Vaporization Systems for CVD Please click to choose MTI CVD furnaces to build your own system.
Application Instruction
Warranty	One year limit manufacture warranty with lifetime tech. support