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MTI  |  SKU: OTF-1200X-ALD

ALD & PECVD Combination Tube Furnace System - OTF-1200X-ALD

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ALD & PECVD Combination Tube Furnace System - OTF-1200X-ALD

MTI

OTF-1200X-ALD is a dual zone tube furnace combining ALD ( Atomic Layer Deposition ) and PECVD ( plasma enhanced chemical vapor deposition )
 for preparing new generation thin film
  • Two 10 ms ALD valves for ultra-thin film deposition
  • Lower temperature processing is required compared to the conventional CVD
  • High heating & cooling rate using sliding furnace
  • Dual heating zone to create thermal gradient up to 500ºC 
  • 1100ºC Max. working temperature in the tube furnace
  • 1100ºC Max. working temperature in pre-heater for heating vapor phase or evaporating solid materials
  • Rapid cooling & Heating for growing 2D  materials
SPECIFICATIONS:
Control Pannel
  • All parameters of Vapor , ALD and Plasma are controlled by PLC via a 6" touch screen pannel
  • Please click picture below to see control inter face
ALD valve
  • Two ALD valves with pulse controller  (min 10 ms duration )
  • 6" touch screen control pannel
Liquid-Vapor Generator
  • Automatic liquid vapor generator is included and connect to  ALD valve
Dual Zone Split Tube furnace 
  • Max 1100ºC for continuous heating
  • Two programmable precision digital temperature controllers with 30 segments.
  • Two separate controlled Heating Zones
    • 200mm length for each heating zone
    • 400mm total in heating length
    • 250mm constant central temperature heating area if both zones were heated at the same temperature
    • 500ºC max temperature difference between two zones with thermal blocks in between
  • Input power: 208 – 240V AC input, single phase at max. 4KW

Plasma RF Power Supply
 
  • Output Power:           5 -500W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:       200W max.
  • Matching:                  Automatic
  • RF Output Port:         50 ?, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Pre-heating furnace
  • Small tube furnace with 200mm length single heating zone
  • Max. temperature:  1100ºC
  • 30 segment programmable temperature control
  • Vapor go through the heater first before get in RF Plasma generator.
  • Can put solid material in the heater for evaporation and mixing with vapor phase.
  • Quartz Tube:   50mm OD x 44mm ID x 2200 mm L   ( 80mm OD tube is available at extra cost
  • Vacuum flange:  included 
  • Quartz Tubes
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Oil-less Vacuum Pump Station and Valves
 
 
Sliding mechanism
  • Sliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.
  • Sliding speed is adjustable from  0-70 mm/s

Heating & Cooling Rates
  • RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)
  • In order to achieve Max.heating rate,  the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
  • In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone
Heating Rate: 
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);




Optional


                    
  • Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control gas flow rate automatically with the system. Please click the picture below left to choose one at your budget.
  • Click picture below - left to order bubbler or evaporator for CVD, and  below right for Constant temperature control module
                            
 

Overall Dimensions
  • Furnace: 550 x 380 x 520  mm 
  • Sliding Rail: dual rail with 1750 mm length
  • Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
  • Net weight: 220 Lbs.
  • Shipping weight: 1200lbs.
Warranty
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