MTI | SKU:
ALC76D05C1US
Al2O3- Sapphire Wafer, C-plane (0001), 3"Dia x0.5 mm, 1SP - ALC76D05C1US
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Al2O3- Sapphire Wafer, C-plane (0001), 3"Dia x0.5 mm, 1SP - ALC76D05C1US
MTI
Features:
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- Sapphire ( single crystal of Al2O3 ) is being used extensively as a substrate for III-V nitrides and for many other epitaxial films
- Orientation: C-axis[0001]( +-0.3o) with Standard Flat
- Diameter: 76.2mm +/- 0.1mm
- Thickness: 500um +/- 25 um
- Major Flat: A-axis[11-20]+/-0.2o
-
Major Flat Length: 22mm +/- 1.0mm
- Surface Finish: Front sides: Epi- polished Ra<0.5nm(by AFM)
- TTV: < 10um
- Polished surface: One side epi polished by special CMP technology
- Package: Each wafer is packed in 1000 class clean room
Typical Properties:
- Crystal Structure: Hexagonal. a=4.758 Angstroms c=12.99 Angstroms
- Melting Point: 2040 degree C
- Density: 3.97 gram/cm2
- Growth Technique: CZ
- Crystal Purity: >99.99%
- Hardness: 9 ( mohs)
- Thermal Expansion: 7.5x10-6 (/ oC)
- Thermal Conductivity: 46.06 @ 0 oC, 25.12 @ 100 oC, 12.56 @ 400 oC ( W/(m.K) )
- Dielectric Constant: ~ 9.4 @300K at A axis ~ 11.58@ 300K at C axis
- Loss Tangent at 10 GHz: < 2x10-5 at A axis, <5 x10-5 at C axis
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