MTI  |  SKU: PF4P

4" Polishing Fixture With Vacuum Jig for Precision & Automatic Thinning and Polishing- EQ-PF-4-1P

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4" Polishing Fixture With Vacuum Jig for Precision & Automatic Thinning and Polishing- EQ-PF-4-1P

MTI

Features
  
  • Precision Polishing Jig for accurate wafer/substrate polishing and back-thinning
  • Thickness control screw fixture with a resolution of 0.005 mm to limit stock remove
  • This Polishing fixture can be fit with Unipol 1202 and 1502 and any precision 12" or larger polishing machine with yoke support to achieve automatic polishing or lapping
  • Super-hard tungsten alloy is welded on the bottom of the jig for polishing resistible
  • Maximum sample thickness: 13mm
  • Maximum travel distance: 14mm
Sample Holder Vacuum chuck
  • The maximum size of a wafer or substrate is 4" diameter
  • If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less than 0.15 mm, please use wax
Digital Micrometer
  • One digital micrometer is included with a resolution of +/- 1 micron for more accurate lapping.
Pressure Indicator
  • One digital balance is included for measuring the fixture weight ( pressure ) 
  • Weight can be adjusted by screws while measuring on the digital balance from 1g to 2000g.
Vacuum Absorption and Filter
  • Require a vacuum pump with a rate > 70 L/ min.
  • To protect the vacuum pump from any moisture and liquid, connect the filter between the fixture and the pump
  •   
Application notes
 This fixture also can polish < 4" wafer via the blue tape method
  • Cut a 4 " diameter blue tape, then stick the 2- 3" wafer or < 4" irregular substrate on the tape
  • Then put the 4" blue tape with the wafer to vacuum the chunk
Size O.D: 146mm; Height: 266mm
Operational Instructions   
Application Notes Please click here to download how to use this fixture.
This fixture also can polish < 4" wafer via the blue tape method
  • Cut a 4 " diameter blue tape, then stick the 2- 3" wafer or < 4" irregular substrate on the tape
  • Then put the 4" blue tape with the wafer to vacuum the chunk
Optional Accessories A vacuum pump is required for vacuum absorption, please order separately.
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