MTI  |  SKU: SH4

4'' Dia. Pinned Shower Head for DIY of ALD/CVD - EQ-SH-4

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4'' Dia. Pinned Shower Head for DIY of ALD/CVD - EQ-SH-4

MTI

This is a 4'' Dia. pinned shower head for uniform gas delivery for DIY of ALD or CVS. It is a necessary tool for developing CVD film on a wafers up to 4'' dia.

Specifications:




Material:  SS 304 for top flange and  Aluminium for the bottom showerhead
Oring:       Silicone 
Gas Feeding Tube: 14 mm O.D x  6.35 mm I.D 
Pin Hole Size


0.8  mm Dia.
Shower

Special design to ensure uniform distribution and gas/vaper 
Dimension
( Click picture right  for details)


Warranty 1-year limited warranty with lifetime support
Weight 2 lbs