MTI  |  SKU: OTF1200XIIISHNG80

24"L 3 Zone Tube Furnace w/ Hinged Flange & Quartz Tube (80-130mm, 1200C Max) - OTF-1200X-III-SHG

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24"L 3 Zone Tube Furnace w/ Hinged Flange & Quartz Tube (80-130mm, 1200C Max) - OTF-1200X-III-SHG

MTI

OTF-1200X-III-S is CE certified and UL Standard 24" Long ( 6"+12"+6")  split-able three-zone tube furnace with quartz tube (size selectable) and hinged type flange. Such configuration allows easy sample loading/ unloading. Three 30 segments of temperature controllers are installed with K-type thermal couples. Microprocessor-based self-tuning PID provides excellent control with no overshooting and  +/- 1 °C accuracy. It is an excellent furnace for sample annealing, diffusion, and sintering in the various gas atmosphere up to 1200°C.    (Please select the tube size in the options bar to view the price and model)
SPECIFICATIONS:
Furnace structure
  • Double-layer steel case with two cooling fans which ensure low surface temperature;
  • Energy-saving high purity fibrous alumina insulation; 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
  • Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum.
Rated voltage
 AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
Power consumption
 6  KW Max.
Heating elements
 Fe-Cr-Al Alloy doped by Mo
Heating zone length
  • Three zones: 610mm (24") in total
  • Z1-Z2- Z3152.4mm (6") + 304.8mm (12") + 152.4mm (6")
  • +/-1ºC Constant Temperature Zone: 260 mm length
  • +/-2ºC Constant Temperature Zone: 480 mm length (click the pic below for detail)
          
Fused Quartz Tube(Please choose from product option) Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L  (mm)
2" wafer Max.		 Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L  (mm)
3" wafer Max.		 Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L  (mm)
4" wafer Max.
Warning The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 Mpa (absolute pressure)
Heating temperature
  • Max. Heating Temperature: 1200°C at flowing gas 
  • Continuous Heating Temperature: 1100°C  at flowing gas 
  • Max. The heating temperature at Vaccum 1000°C 
  • Max. Heating Rate: 20°C/min
Temperature Controllers
        
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • The new version of the PC module is now compatible with Lab View 05/08/2014
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum Flange and Gauge

  
  •  Hinged type flanges are installed on both ends for easy sample loading/unloading;
  • KF25D adapter installed on left flange with a precision digital vacuum gauge;
  • SS needle valve with 1/4" pipe connector installed on right flange;
  • Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by the molecular pump;
  • Optional: you may choose our molecular vacuum pump station for higher vacuum  
Optional Part In order to build a complete CVD system, you may need a bubbler or gas delivery system, and a quartz wafer Carrier. . Please click the picture below to choose:
              
Dimensions
 750mm(L) x 525mm(W) x 670mm(H)  
Net Weight
 70 kg
Warranty
 One-year limited warranty with lifetime support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
Compliance
    
  • CE certified
  • NRTL or CSA certification is available upon request at extra cost
Shipping dimensions
 65"(L) x 45"(W) x 35"(H)
Shipping weight
 340lbs

Application Notes
  • Pls click the picture below to learn how to create a temperature gradient (pic.1)
  • Order a temperature calibration kit by clicking pic.2.
  • Attention:  A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure below 3PSI for safe operation. Click here to learn the installation of a gas regulator. (pic.3)
  • We suggest accommodating an FH-60 fume hood with this furnace (pic.4)
  • pic.1    pic.2    
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