MTI  |  SKU: VTF-1600X-TSSG

2200ºC Top Seeded Solution Growth (TSSG) Furnace - VTF-2200X-TSSG

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2200ºC Top Seeded Solution Growth (TSSG) Furnace - VTF-2200X-TSSG

MTI

VTF-2200X-TSSG is an ultra-high temperature TSSG (top seed solution growth) furnace for growing SiC or Sapphire via flux solution at 2000 degrees. The furnace is heated by an induction coil with a 4" dia graphite crucible and an 8" dia. hermetic quartz chamber. Temperature is detected by a type C thermocouple and controlled by a Eurotherm 3000 series temperature controller. It also equips a precision pulling device with a minimum pulling rate of 0.6 mm/hr and a minimum rotation speed of 0.1 rpm. It can be operated under vacuum, inert gas flow, or reducing environment. 

Power
  • 208 - 240VAC, three phases, 50/60Hz
  • 17 kW Max. A 60 A power panel is required. 
  • 10 feet long 6/4 AWG UL-approved power cable is included. 
  • The power plug is not included. Compatible plugs are available here.  
                
Induction Heating System
 
  • Max.Input Power:     15 KW
  • Output Frequency:    20 - 100 kHz 
  • Duty Cycle:               100%
  • Induction Coil:           220 mm(ID) x 65mm(H) 
  • Cooling:                     Water
  • Control mode:           PID or manual
  • Protection:                water flow interlock, over-temperature, and overpower protection
Heating Chamber


  • Quartz tube:          ?216mm(OD) x ?206mm(ID) x 500mm(H)
  • Top flange:            Special flange with one gas outlet and a pulling device. 
  • Bottom flange:      Special flange with a gas outlet, KF25 vacuum port, and 1/8" thermocouple feedthrough. 
  • Vacuum port:        KF25 port with a valve. 
  • Max. vacuum level: 10-5 torr by turbopump
Crucible and Thermal Insulation

  • One high purity graphite crucible with a lid: Ø114 OD x Ø100 ID x 142 H (mm)
  • Max. effective capacity:    750 ml (The melt should be less than 2/3 of the max volume)
  • Thermal insulation layer:  45 mm-thick three-layer graphite felt
  • Note:  the graphite felt and the crucible are consumable. Spare parts are available. 
  • Crucible rotation (optional): graphite crucible can be rotated at 0.1 - 23 rpm for better temperature uniformity. 

Temperature Control

  • Temp. Controller               Eurotherm 3000 series controller with +/- 0.1 °C accuracy
                                                              with 28 programmable segments.  
  • Heating rate:                        0~60ºC / min     (suggestion at  =< 5ºC)
  • Working Temperature:         2000°C continuous (2200ºC less than 1 hr)
  • Thermocouple:                    1/8" type C thermocouple is placed against the bottom of the graphite surface.             

Pulling and Rotation Device

  • The pulling device is high vacuum compatible with SS bellow. 
  • Pulling rod:                    28 mm water-cooled SS rod
                                          YSZ or Alumina rod is available upon request
  • Pulling rate:                   0.8 - 50 mm/h  (Slower speed is available upon request. Up to 0.06 mm/h)
  • Fast pulling rate:           40 mm/min
  • Max Travel Distance:    300 mm
  • Rotation Speed:            0.1 - 23 rpm (Slower speed is available upon request up to 0.03 rpm)          
  • Optional recirculating water chiller for cooling seed rod:
  •   

Control Panel

  • 7" touch screen control panel for programming all parameters
    • Temperature programs
    • Seed rod rotation speed
    • Pulling speed
    • Store up to 5 recipes.

Vacuum Pump


Vacuum pump and high vacuum station
  • A vacuum pump or pumping station is recommended but not included. 
  • Vacuum level: 10-2 torr via a mechanical pump 
  •                        10-5 torr via a turbopump

Water Chiller

Dimension

1173L×1190W×2070H (mm)

Weight

200 kg

Warranty

  • One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement in the related products below.)

Compliance

  • CE Certified
  • NRTL(UL61010)  or CSA certification is available at extra cost. 

Operation Video