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MTI  |  SKU: OTF-1100X-III-NT

1200°C Two-Zone Tube Furnace w/ Optional Quartz Tube from 11" to 15" - OTF-1100X-II-XX

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1200°C Two-Zone Tube Furnace w/ Optional Quartz Tube from 11" to 15" - OTF-1100X-II-XX

MTI

  OTF-1100X-II furnace is a two-zone tube furnace with an optional quartz tube from OD 11" to 15" and vacuum flanges. Needle valves and, vacuum gauges are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening. Three 30-segment programmable controllers are built-in with a K-type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1ºC accuracy. It has been widely used for CVD,  DVD processing for film growth of  two dimension materials ( TMD: layers of 2D transition metal dichalcogenide )
SPECIFICATIONS


   Furnace structure
  • Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.  
  • Hinged-type flange with water cold for sample loading at ease
  • This furnace can be used as an annealing or diffusion furnace for 8" wafers ( 11"tube) or 12" wafers (15" tube) 
  • The electrical lid actuator provides easy & hassle-free lid opening 
    
Structure schematic
 11" or 15" ceramic blocks
 Holding a 12" wafer Electrical Lid Actuator
Heating zone
  •  Two zones: 450 mm + 450 mm  ( 900 mm in total)
  • Constant temperature zone length: 500 mm (if three zones are in the same temperature within +/- 5°C)
  • Cross-section Temperature tolerance +/- 5°C
Working temperature
  • Max heating temperature:      1200°C 
  • Max heating & cooling rate:     10°C/min
  • SiC heating elements, a total of 36 pcs 
Temperature control
 
  • Three digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: three K-type thermocouples (one for each zone)
    Control accuracy: +/- 1°C
  • Software for PC control is available as optional ( click the picture on the left to order )
Eurotherm Controllers (optional)
  • Temperature Accuracy:  ±  0.1ºC
  • 1 heating zone per controller
  • 1 program of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485 with software
Laptop & software (Optional)
    
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) is available to enable the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
Fused quartz tube
    
  • 11" OD or 15" O.D quartz tube with 71" Length is selectable from product option
  • High purity quartz tube, please click the bottom left picture to view.
  • Warning: quartz tube is fragile, please handle it with care. The warranty does not cover the broken tube by use
Vacuum sealing & Flange
  • A pair of stainless steel vacuum sealing flanges (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
  • Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pumps.
  • One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Options
  •                                
Rated Voltage
  • Three Phase, 208V AC, 50/60 Hz   3 phase 380V is optional
  • AWG 8# Power cord is included (without plug) 
Power consumption
 Max. 20KW (100A breaker required)
Product Dimension
  2000 L x 765W x 1130 H, mm
Net weight
 300kg
Shipping dimension
 		85" x 40" x 70"
Shipping weight
 		1200 lbs
Warranty
  • One-year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings, and quartz tubes are not covered by the warranty)
  • You may order a replacement quartz tube at the link below 
Compliance
  • CE Certified
  • NRTL or NRTLCSA Certification is available upon request at the extra cost
Operation Instructions     
Warning
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar 
  • Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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