1 2
MTI  |  SKU: OTF1200XS5

Compact 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller (1200C Max) - OTF-1200X-S-5

€0,00

Delivery and Shipping to EU

We will add in the quotation, the shipping, insurance, customs clearance costs.

Compact 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller (1200C Max) - OTF-1200X-S-5

MTI

OTF-1200X-S-5 is a compact and energy-saving split tube furnace with a max. the working temperature of 1200°C (Since 2016.11.08) and All electric parts are UL / MET / CSA certified. The furnace adopts a 5" (130mm) O.D quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for the rubber hose connection allows heating samples in the vacuum or flowing gas.  The temperature controller is seperarated from the furnace with 30 segments of heating and cooling steps with +/- 1 °C accuracy. The furnace can anneal wafer up to 4 "in diameter.   


SPECIFICATIONS:

Furnace Structure
 
  • Double-layer steel structure.
  • High-purity Al2O3 fibrous insulation with Max. energy saving.
  • High-purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be modified into many special furnaces ( see the bottom application note)
Power 
3 KW
Voltage
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C (continuous)
Max. Heating Rate
? 20 °C/min
Heating Zone Length
  • 12 " (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC ): ( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Control
 
  • PID automatic control via solid-state relay with 30 steps programmable.
  • Built-in Over Temperature and Thermal-couple Failure Protection.
  • Optional: The furnace may be operated by PC with installing a control module. Please order an MTS02-B control module at extra cost.    
Advanced Temperature Controller (Optional)
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
              Click here to choose a crucible
Vacuum Sealing
       
 Left Flange       Right Flange


Optional Hinged Type Flange at extra cost
  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring and stainless steel protective shield are Included. (click the pictures left for more details).
    • KF25 port is built in the right side flange to connect a vacuum pump.
    • The vacuum gauge, inlet valve, and 1/4 thermocouple feed-through are built-in left side flange.
  • The vacuum level can reach 10-2torr (by a mechanical pump).
  • Option 1Water cooling 5" flange with Support Fixture,  which allows the furnace to achieve1200°C (Pic 1)
  • Option 2:   Hinged type flange for easy sample loading( Pic.1- 2)
  • Option 3: A second temperature as a monitor can be added with additional cost applied. ( Pic 2)
  • Option 4For working temp < 500oC, and use it inside the glovebox,  the furnace can short to 500 mm L ( Pic. 3)
  •     pic 1               Pic 2   Pic. 3
 
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the vacuum port click picture left to order ).
  • You may click the pictures in below to order a furnace with a vacuum pump and a temperature calibration kit.
  •             
Pressure Measurement / Monitoring
        
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa is included.
  • OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.   
Optional Insert-able Thermal-couple

 
  • A K-type insert-able thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • The heating furnace is available
Back to top