MTI  |  SKU: OTF1200XSF4

1200C Max. 4" Tube Furnace with Sliding Flange - OTF-1200X-100-SF

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1200C Max. 4" Tube Furnace with Sliding Flange - OTF-1200X-100-SF

MTI

OTF-1200X-100-SF is a compact 4" ID quartz tube furnace with slidable flange with 1200°C Max. working temperature, which is designed for customers to build a DIY CVD system easily. 

Specifications
Furnace Structure
Rated Voltage Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)
Power Consumption Max. 3600 W (20 A breaker required)

Heating Zone
  • Heating zone Length:  440 mm
  • Constant temperature zone: 100 mm 

Working Temperature
  • Max heating temperature: 1200°C ( < 30 minutes )
  • Continuous working temperature: 200~1100°C
  • Max heating & cooling rate: 20°C/min



Temperature Control
  • Digital controller with PID/self-tuning function and 30 segments programmable
  • Thermocouple: K type thermocouple, which is inserted from the right side flange and connected to the temperature controller.
  • Control accuracy: +/- 1°C
  • Software for PC control furnace is available as optional (click picture below to order)
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Vacuum and Gas Sealing & Flange
  • Right flange:
    • Water cooling structure with 12mm quick connector to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)
    • KF25 vacuum fitting (to the vacuum pump, please click to order a pump,  vacuum hose, valve and sealing gasket)
    • Slidable to easily and fast push/pull in/out the sample
    • One quartz wafer holder ( 3" Dia. max.  ) is built in the flange with heating radiation block for CVD growth on a thin substrate
    • An anti-corrosive capacitance diaphragm gauge is included
  • Left flange with four 1/8'' Swagelok fittings for 1/8'' gas tube:
    • Two separate 1/8'' fitting on the flange for any gas into the CVD furnace 
    •  and customized feedthrough is available upon request.
Net weight
 100kg
Dimensions
  • Standard:    48"L X 18"W X 23"H
  • Maximum:   66"L X 18"W X 32"H  (Lid open and right-side flange slided out)

Warranty
  • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, O-rings, and etc are not covered by the warranty)
  • You may order replacement quartz tube here: EQ-QZTube-RTP
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller

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Compliance
  • CE Certified
  • NRTL or  CSA or TUV certification is available upon request at extra cost. 
                  
Warning
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Please click here to learn how to install the gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions
     
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