MTI  |  SKU: OTF1200XIIRTP

Two Zones CSS Furnace for Rapid Thermal Processing Up to 3" Dia. and Max. 650°C. - OTF-1200X-RTP-II

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Two Zones CSS Furnace for Rapid Thermal Processing Up to 3" Dia. and Max. 650°C. - OTF-1200X-RTP-II

MTI

OTF-1200X-RTP-II is a two-heating zone rapid thermal processing furnace with 11" O.D quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two groups of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30-segment precision temperature controllers are built-in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of the furnace and temperature profile logging via PC.  It is an excellent tool to research new generation thin films for solar cells, such as CdTe, Sulfide, and Perovskite solar cells. It also can be used as RTP for annealing of thin film

SPECIFICATIONS:
Furnace structure & Vacuum Chamber
  • A dual Heater, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame
  • The chamber is made of high purity fused quartz tube
  • Quartz tube size: 11" OD/10.8" ID x 9" H
  • Carbon fiber felt as thermal insulation
  • The vacuum flanges are made of Stainless Steel 316
  • Overall dimension: 850(L)×745(W)×1615(H) mm
Vacuum Flanges
          
  • Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily
  • The bottom flange has one KFD-25 vacuum port with two gas inlets (1/4" pipe required) and needle valves
  • The flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump 
  • Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).
Gas Flow Meters
  • Two float meters are installed on the control panel with a measurement range of:
    • 16 -160 mL/m 
    • 400 - 4000 mL/m (for purging purpose) 
Heater and Sample Holder
  
  • Two shortwave IR lamps as heating elements for fast heating.
  • The distance between two heaters is adjustable from 10 - 50 mm
  • The heaters are made of stainless steel with a water cold jacket to reduce heat radiation and allow for fast cooling
  • 3" round wafer holder is built-in with the top heater to load the substrate
  • One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of the substrate to make it heated uniformly
  • One 3" graphite plate can be used alternatively for the AIN plate, please click the picture below to order.
  • Halogen Light Heater replacement is available at extra cost, please click here to order.
Temperature Controller
  • Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters
  • Each controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and the thermal couple broke
  • PC communication interface & software is installed 


Working Temperature
  • Maximum temperature for each heater: <= 650ºC
  • The maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:
    • Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only
    • Spacing 40mm       Max. temp difference:  350ºC @ heating bottom only
    • Spacing 50mm       Max. temp difference:  395ºC @ heating bottom only
Heating & Cooling Rate
  • Heating: < 8ºC/s ( heating single heater only )
  • Cooling: < 10ºC/s (600 - 100ºC) Max.
Thermal Couple Two K-type thermal couples (exposed) are installed on top and bottom heaters separately
Working Voltage 208 - 240VAC, single-phase, 20A air breaker
Power Requirement 2200W total ( 1100W for each heater )




Optional
  • One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump 
  • If you run corrosive gas, please consider using an anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost
  • You may order a recirculating water chiller for saving water sources separately
  • You may choose a digital MFC gas delivery system by clicking the first picture from the right below
                       
Warranty One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)
Compliance
  • CE Certified
  • NRTL or CSA Certification is available upon request, additional charges will apply
Operation Video            
Note
     
  • The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi
  • Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks to the tube..
Reference Articles
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