MTI  |  SKU: GSL-1100X-SPC16-3-110LD

3 Rotary Targets Plasma Sputter Coater with Vacuum Pump & Three Targets ( Au, Ag, Cu), 2" Max Sample - GSL-1100X-SPC16-3LD

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3 Rotary Targets Plasma Sputter Coater with Vacuum Pump & Three Targets ( Au, Ag, Cu), 2" Max Sample - GSL-1100X-SPC16-3LD

MTI

GSL1100X-SPC16-3 is CE certified  compact plasma sputtering coating machine with three rotatable target holders. It can coat one sample up to 50 mm diameter with 1- 3 type of metallic materials. Three sputtering target: Au, Ag and Cu, vacuum pump, stainless steel bellows with KFD25 adapter & clamps and vapor trap are included for immediate use.


SPECIFICATIONS:

Input Voltage 110V or 220V (can be selected in option bar), 50/60 Hz
Input Power < 2000W (including pump)
Output Voltage (DC) 1600V
Specimen chamber Fused glass tube, 160 mm Dia. x 120mm Height

Specimen stage
  • One 50 mm Dia.sample stage, which can be rotated manually in three positions
  • Max. coating diameter: 45 mm



Accessories included
  • Double Step Rotary Vane Vacuum Pump (external) with Pirani gauge for 110V voltage; 120 L/m  Rotary Vane Vacuum Pump (external ) with Pirani gauge for 220V voltage (Only one vacuum pump is included for each package)
  • Vapor trap eliminates the oil mist
  • Stainless steel bellows with KFD-25 adapter and clamps
  • High purity gold foil target
  • The system requires a Ar gas tank with pressure regulator, which is not included
Gas atmosphere  One needle valve installed to allow Ar gas inlet to achieve better plasma coating


Target

    Note: For light metal or carbon target please consider

    Overall dimension 400mm × 300mm × 400mm (L×W×H)
    Net Weight 50 kg
    Operation Instructions
         

    Warranty & Certificate
    • One year limited with lifetime support
    • CE certified


    Knowledge of Sputter Coating
    		       
     Application Notes
    • The system requires an Ar gas tank with pressure regulator which is not included
    • This model is not suitable for coating light weight metallic material such as Al, Mg and Zinc or Carbon target due to low energy. Please consider our Megnetron-PSC or Carbon Evaporation Coating Syetem. Click the pic bellow for detail.
                                             
             Carbon Evaporating Sys      Megnetron sputtering              2 in 1 system
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