Automated Ultrasonic Spin-Spray Coater (0-3000 rpm, 12" Wafer Max) w/ Heater & Fume Hood - VTC-300BUSS

• Power: 208 - 240 VAC, 50/60 Hz, single-phase, 1800 W in total

• One vacuum chuck for holding substrate up to 12" diameter or 8" square
• One oil-less pump for the vacuum chuck is included and controlled by the spin coater
• Spin speed: 300 - 3000 rpm programmable               

• One ultrasonic generator (up to 50KHz, 100W) with two ultrasonic sprays nozzles 
  
• Two spray nozzles with KF-25 adapters
• One cylindrical type -- narrower spray ~20 mm diameter
• One cone type -- wider spray ~40 mm diameter
• Recommended compressed inert gas or air for the aqueous solution: ~2 psi ( not included)
• Fluid viscosity range: 1 - 50 mPa·s (cP)
• Particle size: 10-20 microns (suspension liquid), ?10% solid
• Flow rate: 0.6 pL-4 ml/min
• One swing arm for mounting ultrasonic spray head.
  
• Swing speed: 1°-20° /s
• Optional: 2- 4 ultrasonic swing spray heads can be added for layer by layer coating at the extra cost

Syringe Pump

• One syringe pump with LCD touch screen control is included for liquid delivery.
• One 50 mL syringe is included. The unit can accommodate a syringe with 0.4-30 mm diameter
• Pumping rate: 0.01-0.99mm/min  adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
• Options:  heatable and multi-channel syringe pump is available upon request at the extra cost                

• Touch screen panel controls most of the parameters, includes
• Spin speed:                  300 - 3000 RPM
• Nozzle swing speed:    1-20°/s 
• Temperature:                RT-50°C
• Spraying time:              1- 999 seconds
• Syringe pump speed>  0.6 pL-4 ml/min

• The machine is built-in with a fume hood with a 4" venting port
• IR heater is a built-inside hood with temperature control up to 80ºC for drying film after coating
• LED light is inside the hood

• Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI
• Attention: If a gas cylinder is used instead of an air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.

           pic1                pic2

• weight:  250 lbs

• CE Certified
• NRTL certification is only available with compressive gas atomizing spray nozzle 

• One year limited with lifetime support
  
• Rusting and damage due to improper storage condition or maintenance are not covered by warranty

• Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the liquid residues in the bow/base. 
• In order to achieve optimal coating quality, please consider cleaning the substrate with a plasma or UV-Ozone cleaner (Click the pictures below for more details) prior to coating. It will significantly reduce the surface tension on the substrates
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• Reference Articles
• Strong Magnetoelectric Coupling in Ferrite/Ferroelectric Multiferroic Heterostructures Derived by Low-Temperature Spin-Spray Deposition
• Spin- and Spray-Deposited Single-Walled-Carbon-Nanotube Electrodes for Organic Solar Cells
• Rapid Assembly of Functional Nanocomposite Films Using Spin-Spray Layer-by-Layer Processing