MTI  |  SKU: OTF1200XSDFSL50

1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL

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1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL

MTI

OTF-1200X-S-50-DFSL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery, and RF Plasma generator are available to build a flexible TCVD system easily at a low cost.

SPECIFICATIONS

Furnace Structure
  • Both furnaces are double-layer steel structures with 1200°C max. working temperature
  • Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
  • Vacuum flanges are installed for immediate use.

Power of furnace
  •  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
  •  2.5 KW in total

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating & Cooling Rates


  Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
 0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1500 mm Length 
Optional:  S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost

Temperature Controller
 
 
  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:  
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • We recommend you order a computer (laptop) from us to avoid software installation problems. For more information please click here

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges
  • Stainless steel vacuum flanges with a vacuum gauge ( click picture bottom left to see details) are installed on both ends of the tube with heavy-duty support. (Pic. 1
  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. ( click Pic. 2), and  water cold flange (Pic. 3)
  •           Pic. 1   Pic. 2  Pic. 3
 Sliding Rails / Table
  • Double sliding rail made by Cr-plated steel
  • Sliding length: 1200 mm
  • Two slide-stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 

  • Limited by pump ( pump is not included, click on pictures to order )
    • 10E-5 torr can be achieved via molecular pump
    • 10E-2 torr can be achieved via a mechanical pump.
                

Optional for upgrade
  • Motorized sliding is available upon request ( please click bottom left picture )- (Pic. 1)
  • 1-9 channel gas mixing and delivery models is available ( click picture 2 in below to order )
  • 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request ( click picture 3 to see detail ). This module allows you build your own Plasma Enhanced Thermal CVD system (Pic. 4)
  • You may need a cold trap to condense the exhaust gas (Pic. 5)
             Pic. 1   Pic. 2    Pic. 3   Pic. 4Pic. 5 

 Dimensions
  • Furnace: 340 x 300 x 400 mm
  • Total:1600 x 430 x 500 mm ( furnaces + sliding )
  •    

 Net Weight

~ 80 Kg

Shipping Package Size

70" x 45" x 45" (inch)

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