Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series
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Delivery and Shipping to EU
Delivery and Shipping to EU
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Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series
MTI
Features:
- Wafer boats are made of ultra-high purity quart (4N purity) for diffusion, oxidation and annealing up to 1200oC.
- Each boat can only carry one size wafers up to 25 pieces from 1" to 12" diameter by 0.5 mm thick seperately.
- Please choose the coorect size of wafer from the product option bar.
Size | Can fit into MTI furnaces | ||||
1" |
OTF-1200X-S50 tube furnace (2" tube furnace) |
![]() 1" wafer with a quartz boat |
![]() Mechanical Drawing |
![]() 1" wafer with quartz boat can be placed into 2" tube |
![]() Place 1" wafer in the center of the furnace |
2" | OTF1200-3 tube furnace (3" tube furnace) |
![]() 2" wafer with a quartz boat |
![]() 2" Quartz boat cross-section drawing (mm) - Length 180 mm |
![]() 2" wafer with quartz boat can be placed into 3" tube |
![]() Place 2" wafer in center of the furnace |
3" | OTF1200-4 tube furnace |
![]() 3" wafer with a quartz boat |
![]() 3" Quartz boat cross-section drawing (mm) - length 180 mm |
![]() 3" wafer with quartz boat can be placed into 4" tube |
![]() Place 3" wafer in center of the furnace |
4" | OTF1200X5L tube furnace |
![]() 4" wafer with a quartz boat |
![]() 4" Quartz boat cross-section drawing (mm) - length 180 mm |
![]() 4" wafer with quartz boat can be placed into 5" tube |
![]() Place 4" wafer in center of the furnace |
4" x 4" |
OTF-1200X-5L, VBF-1200X-H8, OTF-1100X-8.5 tube furnaces |
![]() 4" wafer with a quartz boat |
4" x 4" Square wafer with quartz boat can be placed into 8" tube | ![]() Place 4" wafer in center of the furnace |
|
6" |
GSL1100X-8.5-S-UL tube furnace, GSL1100X-8.5-III tube furnace, Compact Vacuum Chamber Furnace EQ-VBF-1200X |
![]() The dimension of 6" quartz boat |
![]() 6" Quartz boat cross-section drawing (mm) - length 190 mm |
![]() 6" wafer with quartz boat can be placed into 7" tube |
![]() The 6" quart boat can fit in VBF1200 Muffle Furnace |
8" | GSL1100X-11-III tube furnace |
![]() The dimension of 8" quartz boat |
![]() 8" Quartz boat cross-section drawing (mm) - length 173 mm |
![]() 8" wafer with quartz boat can be placed into 8.5" tube |
![]() Place 8" wafer in center of the furnace |
12" |
OTF-1100X-III |
![]() The dimension of 12" quartz boat |
![]() 12" Quartz boat cross-section drawing (mm) - length 172 mm |
![]() 12" wafer with quartz boat can be placed into 15" tube |
![]() Place 12" wafer in center of the furnace |
Inspect your delivery:
Please check the package for damages before accepting delivery.
Should damages found, please keep all packaging materials, take pictures, and report immediately to carrier/MTI.
No Warranty:
Kindly note this item is a consumable part, and not covered by warranty. Make sure to inspect for defect(s) thoroughly before use.