MTI  |  SKU: VBF1100XRTPASD

1100°C Max IR Fast Heating / Cooling & Atmosphere Controlled Bottom Loading Furnace VBF1100XRTPASD

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1100°C Max IR Fast Heating / Cooling & Atmosphere Controlled Bottom Loading Furnace VBF1100XRTPASD

MTI

The VBF-1100X-RTP-ASD is a fully automatic bottom-loading rapid heating and cooling furnace with a Φ130mm quartz tube and an air-tight flange. It uses shortwave infrared lamps as heaters, reaching 50°C/sec heating rates and a maximum temperature of 1100°C. It is an excellent tool for preparing single-atom catalysis, and annealing wafer up to 6".

The system supports multi-unit control via a single PC, communicating with robotic systems for continuous, high-throughput sample sintering. It enables remote and local control of vacuum, gas supply, sintering, and furnace operations.

Its automation and broad communication protocol support make it ideal for AI-driven materials laboratories.

 

SPECIFICATIONS

Power Supply

Three-phase AC 208V, 50/60Hz

Maximum Power

18 kW

Features
  • Ultra-fast Shortwave Infrared Heating rate of up to 50°C/s.
  • Seamlessly integrates with robotic arms for efficient and automated sample placement.
  • Automated Process Execution –  sample loading/unloading, flange, inert gas purging, automated gas flow control, heating, temperature holding, and cooling via a Laptop
  • Supporting multiple cycle operations
  • High-throughput sintering Capability by deploying multiple units with the help of a single robotic arm.
  • A dual-layer Chamber with an Air Cooling System ensures efficient thermal management and system durability.
  • Integrated Vacuum Control with a resistance vacuum gauge, enabling micro-positive pressure control (103,000–120,000 Pa) to maintain stable furnace pressure.
  • High-purity alumina Fiber Insulation provides superior energy efficiency and thermal insulation.
  • Comprehensive Data Logging software records temperature, pressure, and other critical parameters, with the ability to upload data via communication interfaces.
Thermocouple

K-type thermocouple

Heating
  • Maximum Operating Temperature: 1000℃ (≤ 30 minutes)
  • Long-Term Operating Temperature: 900℃
  • Heating Elements: 12 shortwave infrared lamps, 1.5 kW per lamp
  • Heating Zone: Φ210mm × 100mm
  • Heating Rate: Room temperature to 900℃: Recommended 10℃/s, Maximum 50℃/s
  • Cooling Rate (in a sealed furnace environment):
    • 800℃ to 350℃: 55℃/min
    • 350℃ to 200℃: 5℃/min
  • Cooling Rate (in an open furnace environment):
    • 800℃ to 350℃: 200℃/min
    • 350℃ to 50℃: 35℃/min
Temperature Control
  • PID Automatic Temperature Control via touch screen om a separated unit
  • Intelligent 50-segment programmable temperature control
  • ±1℃ Temperature Control Accuracy (Optional upgrade: ±0.1℃ with Eurotherm controller)
  • High-precision SCR (Silicon-Controlled Rectifier) intelligent power regulation: 
  • Default DB9 PC communication port for remote monitoring and control.
Stainless Steel Flange Sealing System
  • A set of water-cooled sealing flanges
  • The upper flange has a resistance vacuum gauge, K-type thermocouple, mechanical pressure gauge, and G1/4 double ferrule gas inlet.
  • The upper flange has a KF25 vacuum port reserved.
  • The quartz tube plug and sample stage are placed on the lower flange.
Sample Stage and Tube Block
  • Tube Block: Made of white quartz, with two white quartz baffles fixed by three ceramic rods.
  • Sample Stage: Diameter: 105mm, featuring a rectangular recess (76×58mm) for sample placement (customizable based on customer requirements).
Software
  • Operation software is included to connect PC
  • Supports multi-units 
  • Set temperature profile, gas flow rate, and sample loading/unloading cycles.

  • With the help of a robotic system(optional at extra cost) can execute the following workflow:

    1. Loads the sample and closes the chamber door automatically .
    2. Vacuum evacuation and purging, followed by a protective gas introduction (also configurable for air sintering or vacuum sintering).
    3. Multi-segment heating, holding, and cooling program execution (up to 50 segments).
    4. Stops gas supply, and the chamber door can open at 300°C for sample exchange.
    5. Open-source software supports embedded loop process control for robotic integration.
    6. The entire process is automatically recorded and uploaded via communication protocols.

     

  • Software displays the following parameters:

    • Furnace tube pressure values (including vacuum level).
    • Built-in mass flow controller (MFC) with a range of 0-5000sccm.
    • Cleaning Cycles: 0 to 3 cycles Configurable.
Automated Robotic Assistance (Optional)
  • Rated Load: 5 kg
  • Working Radius: 900 mm
  • Maximum Arm Reach: 1096 mm
  • Rated Voltage: DC 48V
  • Robot Weight: 25 kg
  • Repeat Positioning Accuracy: ±0.02 mm
  • Communication Protocols: TCP/IP, Modbus, Wireless Network
  • Typical Power Consumption: 150W

Water Chiller (Optional)

KJ6500

  • Power: 220-415 VAC, 3 phase
  • Frequency: 50 Hz/60 Hz
  • Nominal Cooling Capacity: 51880 BTU/h,  12897 Kcal/h
  • Compressor Power:
    • 4.6 kW, 6.16 HP(50Hz)
    • 5.12 kW, 6.86 HP(60Hz)
Vacuum System (Optional)
NRTL certified 240 L/m Heavy Duty Double Stage Rotary Vane Vacuum Pump with Exhaust Filter - EQ-YTP-550-LD 

Application Notes

Inert Gas Regulator , Two Stage Brass 0-100 psi Analytical Cylinder Regulator - CGA-580-LD
  • The internal pressure of the quartz tube must not exceed 0.02 MPa.
  • A pressure regulator must be installed on the cylinder before introducing gas into the quartz tube.
    • For safety, it is recommended to use a pressure below 0.02 MPa.
    • We recommend purchasing a MTI pressure regulator , which has a range of 0.01 MPa – 0.1 MPa, ensuring greater accuracy and safety.
  • For sample heating experiments, it is not recommended to operate with both the exhaust valve and gas inlet valve on the furnace tube flange closed.
    • If gas valves must be closed during sample heating, the pressure gauge reading must be monitored at all times.
    • If the pressure exceeds 0.02 MPa, the release valve must be opened immediately to prevent potential hazards such as quartz tube rupture or flange detachment.
  • We do not recommend using flammable, explosive, or toxic gases.
    • If the process requires the use of such gases, customers must take appropriate protective and explosion-proof measures.
    • Our company is not responsible for any issues arising from the use of flammable, explosive, or toxic gases.