MTI | SKU:
VBF1200XV9
1100C Max Vertical Vacuum Furnace with Flange (8" OD Quartz Chamber) - VBF-1200X-V9
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1100C Max Vertical Vacuum Furnace with Flange (8" OD Quartz Chamber) - VBF-1200X-V9
MTI
VBF-1200X-V9 is a Vertical vacuum-sealed furnace.It equips an Ø200×Ø190×H425 mm quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature of up to 1100°C.
SPECIFICATIONS
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Heating Elements |
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Quartz Tube & Effective Heating |
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Vacuum Flange ![]() |
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Water Cooling![]() |
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Temperature Controller![]() ![]() |
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Options |
You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).![]() ![]() ![]() |
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