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MTI  |  SKU: GSL-1100-Micro

Micro-CVD/PVD Furnace for in-Situ Analysis w. 2 Heating Zones, 1100°C Max. - GSL-1100-Micro

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Micro-CVD/PVD Furnace for in-Situ Analysis w. 2 Heating Zones, 1100°C Max. - GSL-1100-Micro

MTI

GSL-1100-Micro is a micro-tube furnace of CVD/PVD (also called hybrid PVD and CVD, HPCVD).  There are two heating plates in a 25 mm ID  quartz tube with a flat UV--grade window.  The micro tube furnace can be placed under an optical microscope or Raman spectrum to observe 2-dimensional film growth in situ by PCV, CVD, or hybrid PVD/CVD up to 1100ºC.

SPECIFICATIONS:
Power Requirement
  • Single Phase 208 - 240VAC,  50/60Hz, single phase
  • 3000W (15Amp circuit breaker is required)
  •  220VAC version is available via a transformer
Furnace Structure
  • Special quartz tube  OD 30 x ID 24 x L370 (mm),  One 12 mm Dia flat UV- grade window is welded on the tube for in-situ observation of film growth.
  • Vacuum-sealed flange:  one pair of the flange is included with the feed-throughs of  electrodes, thermal couple, gas inlet & outlet with KF 25 vacuum port
  • Micro-Heating Plates:  Two ceramic-coated heating plates of  W17 x L 25 mm are inserted into the processing tube from two ends.  The left-side heating plate is adjustable 
    • Max. heating temperature:  1100ºC
    • Max. Heating rate:  5ºC/S  ( 300ºC/minute )
  • Flange supports are included with adjustable height
Temperature Controller
  • A dual Temperature Control Unit with 30 Segments Programmable is included for controlling two heating plats independently.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • +/- 1ºC temperature accuracy.
  • Two K-type thermocouples (one for each zone).    
Optional
( click the pictures to order at extra cost)
Dimensions

        
Warranty One-year limited warranty with lifetime support. (Consumable parts such as processing tubes, and o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
Reference Video
Compliance
  • CE Certified
  • NRTL  or CSA certification at extra cost. (please click marks below to learn details)
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