N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B
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N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B
MTI
EQ-MFC-7B is a cost effective MFC for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
- MFC are standard calibrated by N2 while it is out of factory, other gas calibration can be approximated by converting of conversion factors of our instruction,
- Other gas calibration MFC can be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO.
- Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only
- Ideal for vacuum coating and other gas mixture applications.
- International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting
- Note This MFC is for replacement of MTI gas mixing and delivery system at related product below. In order to operate it independently, you need order MFC-COM
Specification
|
Full scale range (N2) |
( 0100,200, 500, 1000, 2000, 5000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com |
|
Accuracy |
±1.5% F.S. |
|
Repeatability |
±0.2% FS |
|
Linearity |
±1% FS |
|
Response Time |
≤10sec |
|
Valve Configuration |
Normally Closed |
|
Operation Temperature |
545 |
| Input Signal | (05) VDC |
| Output Signal | (05) VDC |
|
Power Supply |
+15V 50mA; -15V 200mA |
|
Electronic Connector |
D sub 15 pins male |
|
Differential Pressure |
(0.10.5) Mpa |
|
Max Pressure |
3MPa |
|
Leak integrity |
1×10-8 atm·cc / sec He |
|
Seals Materials |
Viton; Neoprene |
|
Fittings |
Swagelok1/4” |
|
Weight |
1.1kg |
