MTI  |  SKU: OTF-1200X-II-50-PEC4SL

1200C Max. Slid-able Dual Zone PECVD Furnace w/ Gas Delivery & Vacuum Pump - OTF-1200X-II-PEC4SL-LD

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1200C Max. Slid-able Dual Zone PECVD Furnace w/ Gas Delivery & Vacuum Pump - OTF-1200X-II-PEC4SL-LD

MTI

OTF-1200X-II-PEC4SL is a multi-zone slidable PE-CVD tube furnace system consisting of a 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits:
  • Lower temperature processing compared to conventional CVD
  • High heating & cooling rate using a sliding furnace
  • Each heating zone to create a thermal gradient up to 200ºC
  • 1100ºC Max. working temperature
  • Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single-layer graphene
SPECIFICATIONS
Model
  OTF-1200X-II-50-PEC4SL OTF-1200X-II-80-PEC4SL OTF-1200X-III-5-PEC4SL
Tube Size
(Pls select in options bar)
 2" (50mm) OD x 1.7" ID x 71" Length 3.14" (80mm) OD x2.83" ID x71'' L 
 5" (130mm) OD x 4.8" ID x 79'' Length
Furnace
 OTF-1200X-II-50 OTF-1200X-II-80 OTF-1200X-III-S-130



Features
  • Two programmable precision temp. controllers with 30 segments.
  • Two separately controlled Heating Zones: 
  • 200mm length for each heating zone
  • 400mm total in heating length
  • 250mm constant temperature heating area if both zones were heated at the same temperature
  • Two programmable precision temp. controllers with 30 segments.
  • Two separately controlled Heating Zones: 
  • 200mm length for each heating zone
  • 400mm total in heating length
  • 250mm constant temperature heating area if both zones were heated at the same temperature
  • Three programmable precision temp. controllers with 30 segments.
  • Three separately controlled Heating Zones: 
  • 200mm length for each heating zone
  • 600mm total in heating length
  • 480mm constant temperature heating area if all zones were heated at the same temperature


Furnace Structures
  • Split tube furnace with sliding rail
  • Max 1100ºC for continuous heating
  • Multi-programmable precision digital temperature controllers with 30 segments.
  • Input power: 208 – 240V AC input, a single phase at max. 4KW

Plasma RF Power Supply
 
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:       200W max.
  • Matching:                  Automatic
  • RF Output Port:         50 ?, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz

Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens the process cycle
  • Easy to exchange plug & play sensor element
  • Click the pic to view the detail spec.
Vacuum Pump Station and Valves
  • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM, 240 L/m) with Two-Stage Exhaust System installed in the bottom case
  • KF25 adapter and stainless steel pipe are connected between the pump and tube flange with a ball valve for the customer's plug and play
  • 10E-2 Torr vacuum can be achieved inside the processing tube     
 



Mass Flowmeters & Gas Mixing Station
  • It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.  The LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel.
  • Working Temperature: 5~45 ºC
    • Max. Pressure: 3x106 Pa
    • Accuracy: ±1.5% FS
    • Liner: ±0.5-1.5%F.S.
    • Duplicate accuracy: ±0.2%F.S.
    • Controlling Range:
      • Controller 1: 0~100 SCCM
      • Controller 2: 1~199 SCCM
      • Controller 3: 1~199 SCCM
      • Controller 4: 1~499 SCCM
  • Click the picture left below to order bubbler or evaporator for CVD constant pressure control module
              



Heating & Cooling Rates
  • RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from here )
  • In order to achieve Max. heating rate,  the user must preheat the furnace to the desired temperature, then slide the furnace to the sample zone of the tube
  • In order to achieve the Max. cooling rate, move the heated furnace from hot zone to cold zone
Heating Rate: 
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec  (1000 - 950°C);
10°C/sec  (950°C - 900°C);
7°C/sec    (900°C - 850°C);
4°C/sec    (850°C - 750°C);
2°C/sec    (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec    (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
 
Overall Dimensions
      2000mm L X 800mm W X 1500mm H
Shipping Weight & Dimension
Shipping Weight: 1500lbs
Total 4 Pallets:   (1) 
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