MTI  |  SKU: OTF-1200X-S-II-PECVD

1100C PECVD Rotary Furnace with Vacuum Pump - OTF-1200X-S-II-PECVD

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1100C PECVD Rotary Furnace with Vacuum Pump - OTF-1200X-S-II-PECVD

MTI

OTF-1200X-S-II-PECVD is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) system. It consists of a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump. Such a system is an excellent tool for heat-treating inorganic compound powders with surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

SPECIFICATIONS:
System Structure
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature
  • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.
    Note: Gas tank is not included
Two-Zone Rotary Furnace
  • Working temp: 1100ºC Max (<1hrs), and 1000ºC for continuous heating
  • Two PID temperature controllers with 30 segments programmable
  • Input Power: 208 - 240 VAC, single phase at max. 1.5KW
  • High purity Alumina fibrous insulation for max. energy saving
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
  • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone
Plasma RF Power Supply
 
 
  • Output Power: 5 -300W adjustable with ± 5% stability
  • RF frequency: 13.56 MHz ±0.005% stability
  • Reflection Power: 100W max.
  • Matching: Automatic
  • Power: 208-240VAC, Single Phase, 50Hz
                
Sealing Flanges
    • Standard: 2'' O.D Fused quartz processing tube, please click the pic on the left for details
    • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use
    Sealing Flanges
     
    • A pair of 1'' O.D quick disconnect flange with KF25 port is installed on each end of the tube
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)
                      
    Tube Rotation Speed
    • 0 - 5 RPM variable
    Vacuum Pump & Gauge
     
    • Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs
    • KF25 adapter and stainless steel bellows are connected between the pump and tube flange
    • 10E-2 Torr vacuum can be achieved inside the processing tube
    • Note: Vacuum Gauge is available at additional cost, please click underline and to order



    Temperature Control
          
    • Two heating zone design with individual temperature controller
    • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments
    • Built-in overheating & broken thermocouple protection
    • Over-temperature protection and alarm allow for operation without attendant(s)
    • +/- 1 ºC temperature accuracy
    • Two K-type thermocouples (one for each zone)
    • RS485 Communications Port
    • Optional:  
      • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at an extra cost
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here
      Dimensions & Weight
      • Furnace: 1400mm L x 600mm W x 1240mm H (with lid opened)
      • Net weight: 400 lbs
      • Shipping Weight: 500lbs
      Warranty
      One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
      Volumetric Feeder and Collector Tank (Optional)      pic. 1                      pic.2
      • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treatment. Please click the pic.1 on the left to order
      • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of the processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details
      • Note: contact us for customization details
      Laptop, software & WiFi Control (Optional)
      • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use
      • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces
      • A wireless remote control provides up to 300 meters of operating range
      • The above features are available upon request at an extra cost (up to $1,000)
      • Note: The software is only compatible with MTI’s Yudian Temperature Controller
      Compliance
       
      • CE Certified
      • NRTL or CSA certification is available at an extra cost
      Application Notes
      Click here to learn the installation of a gas regulator

      • Attention
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