MTI  |  SKU: PP3PSA

Three pieces 3" Poromeric Polishing Pad (PSA) for Final Polishing - PP3PSA

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Three pieces 3" Poromeric Polishing Pad (PSA) for Final Polishing - PP3PSA

MTI

Poromeric pad is made of napped none-woven materials with uniform pore structure and wall strength. There are three pieces of the polishing pads in the standard package.
Specification

Part Number PP-3PSA-SY
Quantity Three
Size 3"

Application

  • Final polishing of LiNbO3 and Sapphire wafers
  • Final polishing in CMP for semiconductors and oxide crystals.
  • EPI polishing for all single crystal substrates.
  • The 3" pad is designed for final polishing at Unipol 300 mini polisher.