MTI  |  SKU: PESH-4

4'' Dia. Shower Head for DIY of Plasma Enhanced CVD System - EQ-PESH-4

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4'' Dia. Shower Head for DIY of Plasma Enhanced CVD System - EQ-PESH-4

MTI

PESH-4 is a 4'' Dia. Shower Head for DIY of Plasma CVD system. It is a necessary tool to coat a thin film by CVD or ALD method.

Specifications:
Structure

  • Material:  SS 304 
  • One 24DC solenoid valve on the top to control gas or vapor delivery electronically
  • The power cable of the RF plasma generator is inserted into the showerhead
  • 13.56 MHz FR generator is required to produce a plasma ( click picture below to order )
Pin Hole Size


1.0  mm Dia.
Shower

Double-layer shower to make gas delivering more uniform
Dimension
( Click picture right  for details)


Warranty 1-year limited warranty with lifetime support
Weight 2 lbs