2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - EQ-ALD-GSL-4

Working Voltage

Power

PLC Touch Screen  

• All parameters of ALD vapor pulse time and  Gas flow are controlled by PLC via a 6" touchscreen panel in a mobile cart 
• Control Two ALD valves with pulse duration time and cycling with microsecond precision
• Control For channels gas delivery with ±0.2%F.S via MFC
• Display vacuum pressure 
• Other parameters upon request of the customer
• Please click the picture left to see the control interface
•  RS485 Port and supplied software are included for remote operation by PC.

 ALD Valves

• Two ALD valves are inlcuded to deliver drying gas or liquid-vapor precursor vapor.
• The numbers of ALD channels can be customized upon request
• Max. frequency on/off: 283 HZ
• Min. Pulse time: 10 ms

•  Four MFC is included to deliver 4 types of carrying gases independently or by mixing 
  
• Controlling Range:
• Controller 1: 0~100 SCCM
• Controller 2: 1~199 SCCM
• Controller 3: 1~199 SCCM
• Controller 4: 1~499 SCCM
• Note: Other range MFC can be customized at extra cost upon request. ]
• Working Temperature: 5~45 ºC
• Max. Pressure: 3x10⁶ Pa
• Accuracy: ±1.5% FS
• Liner: ±0.5-1.5%F.S.
• Duplicate accuracy: ±0.2%F.S.
  

• One stainless steel gas mixing tank is built-in
• Internal pipeline: 1/4" O.D stainless steel
• External pipeline: 1/4" O.D PTFE

• 4 needle valves made of  316 Stainless Steel are included
• ?1/4” Swagelok Tube Fitting

• All components are CE certified 
• The unit can pass TUV(UL61010) or CSA certification at extra cost. 

• You may consider ordering a bubbler or vapor delivery system by clicking picture below
• We can help you to connect the ALD control unit with the MTI tube furnace at extra cost