Stainless Steel Bubbler for CVD Liquid Precursors (150, 300, 600 or 1000ml) - BLSS
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Stainless Steel Bubbler for CVD Liquid Precursors (150, 300, 600 or 1000ml) - BLSS
MTI
In typical CVD processes, The Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapor phase. Such a unit features two stainless steel needle valves with 1/4'' Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation. Its leak-free 316 Stainless Steel vessel is able to withstand pressure up to 0.15Mpa @ 250°C. Please choose150mL, 300mL, 600mL and 1000 mL at product option bar.
SPECIFICATIONS:Model# |
BL-SS-150![]() |
BL-SS-300![]() |
BL-SS-600![]() |
BL-SS-1000![]() |
Vessel Volume | 150ml | 300ml | 600ml | 1000ml |
Vessel Dimensions |
Inner: ?45 x 84mm Outer: ?51 x 104mm ![]() ![]() |
Inner: ?45 x 180mm Outer: ?51 x 187mm ![]() ![]() |
Inner: ?70 x 154mm Outer: ?76 x 200mm ![]() ![]() |
Inner: ?70 x 258mm Outer: ?76 x 300mm ![]() ![]() |
Tool | ||||
Overall Dimensions | 130x70x340mm (LxWxH) | 130x70x440mm (LxWxH) | 130x90x440mm (LxWx H) | 130x90x540mm (LxWxH) |
Heating Capability | Optional Heating Jacket EQ-HC-BL with built-in K-type thermocouple Max. Heating Temperature 250C. ![]() |
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150°C max. heat temp | 150°C max. heat temp | 150°C max. heat temp | 150°C max. heat temp | |
Vessel Material | 316 Stainless Steel | |||
O-ring | Perfluoroelastomer (FFKM) | |||
Sealing Material in Valve | Soft PTFE | |||
Pressure Gauge | -0.1 ~ 0.15 Mpa | |||
Max. Pressure | 0.15Mpa | |||
Fittings | Two SS needle valves with 1/4" Tube Fittings (PTFE frit as sealant) | |||
Application Notes |
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Application Instruction |
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Warranty | One-year limit manufacturer warranty with lifetime tech. support |